2019-8-1 · Designed for the chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) of a variety of materials, including silicon carbide, pyrolytic carbon, boron nitride, zinc selenide and zinc sulfide. Gas and vapor delivery systems coordinate mass flow controls and modulating valves to deliver reactant and carrier gases like N, H, Ar, CO2, methane, silicon tetrachloride, methyl
